SEM主动隔振平台SEM base LP

名称: SEM主动隔振平台SEM base LP

型号: SEM ba<x>se LP

品牌: TMC

  • 详细信息

赛默飞世尔定制版SEM主动隔振平台SEM Base LP


SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.


Example of how SEM-Base LP integrates with the bottom frame of the tool


Compatible Thermo Fisher Tool Models

SEM-Base LP is compatible with many Thermo Fisher Scientific models including:

? Apreo

? Aquilos

? Helios Small DualBeam

? Nova NanoSEM x50

? Quattro S

? Scios

? Teneo

? Verios G4

? Verios 460, 460L

? Versa 3D


If your SEM/FIB is not listed, contact TMC to check for compatibility.


The SEM-Base Advantage

Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.


Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 


Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.



1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)



Performance Specifications

Active degrees of freedom 6
Active bandwidth 0.6 Hz - 100 Hz
Passive natural frequency 12 Hz nominal
Effective active resonant frequency 0.5 Hz
Isolation at 1 Hz 40% - 70%
Isolation at 2 Hz 90%
Isolation at ≥3 Hz 90-98%
Internal noise <0.1 nm RMS
Operating load range 900 - 2,500 lbs (408 - 1134 kg)
Magnetic field emitted
at maximum 4 in.(102 mm)
from the platform
<0.02 μG broadband RMS


Design, Dimensions, and Environmental and Utility Requirements

Environmental and safety CE and RoHS compliant
Active isolation elements High-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation element single stiff elastomer (no compressed air supply required)
Vibration sensor elements Downward facing geophone type inertial sensors
that measure floor vibration below the isolator
and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop Floor vibration is measured, processed
and attenuated below the spring
supporting the isolated surface
Dimensions (WxD) 33.3 x 34.9 in. | 846 x 887 mm
41 x 34.9 in. | 1041 x 887 mm total with casters
Height 5.26 in. (134 mm) nominal,
doesn't change when SEM-Base is switched off
Operating temperature 50° - 90° F
10° - 32° C
Storage temperature -40° - 130° F
-40° - 55° C
Humidity < 80% @ 68° F | 20° C
System power requirements 100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant
Floor displacement <800 μin. (20 μm) below 10 Hz


Controller Specifications

Processor 150/75 MHz dual core
Sampling rate 10 kHz
Analog outputs 16 channels
Analog inputs 16 channels
Status light single LED
Front panel ports 1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC
User interface Front panel LCD display
Character menu on HyperTerminal
Extended GUI for 微软 Windows
Embedded Ethernet GUI



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